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EBL column: This is the room housing the main electron column, high voltage source, and chamber.
EBL cassette table: This table is also in the column room and it is where samples are carefully placed into cassettes on a teflon sheet.
EBL spincoat area: Here samples are prepared for resist spin coating and baking. This room is adjacent to the console room.
EBL console room: The main workstation is in this room. Job files are prepared and executed here.
|Electron Beam Lithography Facility|
|Institute for Electronics and Nanotechnology, Georgia Institute of Technology|