Nanolithography.  The Electron Beam Lithography Facility at the Institute for Electronics and Nanotechnology of the Georgia Institute of Technology.Georgia Institute of TechnologyInstitute for Electronics and Nanotechnology
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ELS-G100 Georgia Tech’s Institute for Electronics and Nanotechnology (IEN) currently operates an Elionix ELS-G100 100kV electron beam lithography system.

Electron Beam Lithography Facility
Institute for Electronics and Nanotechnology, Georgia Institute of Technology