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Electron Beam Lithography System Vendors: Elionix Inc. Japan SEMTech Solutions, Inc. JEOL Ltd. Japan JEOL USA Inc. Raith GmbH CRESTEC Corp. Japan Electron Beam Lithography Resist Vendors: Applied Quantum Materials Inc. (Canada), (HSQ/SiOx powder) ALLRESIST GmbH, (CSAR, AR-P, AR-N) DisChem Inc. (USA), (HSQ/H-SiQ) Kayaku Advanced Materials Inc. (USA), (PMMA, Co-polymer, LOR, ma-N, mr-PosEBR, SU-8) KemLab Inc. (USA), (PMMA/HARP, SU-8/HARE-SQ) MicroChemicals GmbH, (AZ® nLOF 2000) Zeon Specialty Materials Inc. (USA), (ZEP) Software: AutoCAD Casino, (free Monte Carlo simulation of electron trajectory in solids) GenISys GmbH, (BEAMER, TRACER) Georgia Tech software distribution KLayout, (free GDSII editor) LayoutEditor, (GDSII editor) LinkCAD, CAD file conversion tool urpec, (free proximity effect correction software by the Nichol Group at the Univ. of Rochester) Win X-Ray, (free Monte Carlo simulation of electron trajectory in solids)

Electron Beam Lithography Facility Institute for Electronics and Nanotechnology Georgia Institute of Technology