|
|
|
|
|
Electron Beam Lithography System Vendors:
Electron Beam Lithography Resist Vendors:
Applied Quantum Materials Inc. (Canada), (HSQ/SiOx powder)
ALLRESIST GmbH, (CSAR, AR-P, AR-N)
DisChem Inc. (USA), (HSQ/H-SiQ)
Kayaku Advanced Materials Inc. (USA), (PMMA, Co-polymer, LOR, SU-8)
KemLab Inc. (USA), (PMMA/HARP, SU-8/HARE-SQ)
micro resist technology, (ma-N, mr-EBL)
Zeon Specialty Materials Inc. (USA), (ZEP)
Software:
|
