Nanolithography.  The Electron Beam Lithography Facility at the Nanotechnology Research Center of the Georgia Institute of Technology.Nanotechnology Research CenterGeorgia Institute of Technology
HOME   •  SERVICES   •  PROCESSES   •  NANOIMPRINT   •  LINKS   •  CONTACTS                     日本   中文   한국어   فارسی

Electron Beam Lithography Training

    We prefer that individuals be trained to operate the JBX-9300FS themselves, whether they be researchers within Georgia Tech, from other academic institutions, or from a company. We can also be contracted to perform work for you.

    The first step to being trained is to attend a lecture which will introduce you to electron beam lithography concepts and the specifics of our instrument.

    We typically hold these lectures about once a month. If a lecture is not currently scheduled, you can request one.

    After completing the lecture, you will then begin hands on training with one of the trainers. Once you have mastered the basic requirements to operate the system independently, you may request a check-off session with the trainers.

Electron Beam Lithography Rates

    JBX-9300FS usage costs:

    The following charges apply when an individual operates the JBX-9300FS.
         Georgia Tech Researchers $100/hr + overhead
Other Academic Researchers $100/hr + overhead
Industrial Rate $975/hr + overhead

    There is a $50/month charge in each month activity occurs for material and supply recovery.

    The following additional charges apply when an individual is not trained to operate the JBX-9300FS and staff perform the work instead.

          Academic Rate $60/hr + overhead
Industrial Rate $60/hr + overhead

    Overhead rates are as follows:

    35.0% for University System of GA (USG) institutions
    52.7% for non-USG Universities and non-DOD federal
    57.0% for DOD
    59.8% for Industry
Electron Beam Lithography Facility
Nanotechnology Research Center, Georgia Institute of Technology