Electron Beam Lithography Training
We prefer that individuals be trained to operate the JBX-9300FS themselves, whether they be
researchers within Georgia Tech, from other academic institutions, or from a company. We can also be contracted to perform work for you.
The first step to being trained is to attend a lecture which will introduce you to electron beam lithography concepts and the specifics of our instrument.
We typically hold these lectures about once a month.
If a lecture is not currently scheduled, you can request one.
After completing the lecture, you will then begin hands on training with one of the trainers. Once you have mastered the basic requirements to operate the system independently, you may request a check-off session with the trainers.
Electron Beam Lithography Rates
JBX-9300FS usage costs:
The following charges apply when an individual operates the JBX-9300FS.
| ||Georgia Tech Researchers|| ||$100/hr + overhead|
| ||Other Academic Researchers|| ||$100/hr + overhead|
| ||Industrial Rate|| ||$975/hr + overhead|
There is a $50/month charge in each month activity occurs for material and supply recovery.
The following additional charges apply when an individual is not trained to operate the JBX-9300FS and staff perform the work instead.
| ||Academic Rate|| ||$60/hr + overhead |
| ||Industrial Rate|| ||$60/hr + overhead |
Overhead rates are as follows:
|35.0% for University System of GA (USG) institutions |
|52.7% for non-USG Universities and non-DOD federal|
|57.0% for DOD|
|59.8% for Industry|