Nanolithography.  The Electron Beam Lithography Facility at the Institute for Electronics and Nanotechnology of the Georgia Institute of Technology.Georgia Institute of TechnologyInstitute for Electronics and Nanotechnology
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Electron Beam Lithography Training

    We prefer that individuals be trained to operate the JBX-9300FS themselves, whether they be researchers within Georgia Tech, from other academic institutions, or from a company. We can also be contracted to perform work for you.

    The first step to being trained is to attend a training session which can be requested on the cleanroom.ien.gatech.edu website.

Electron Beam Lithography Rates

    JBX-9300FS usage costs:

    The following charges apply when an individual operates the JBX-9300FS.
         Georgia Tech Researchers $110/hr + overhead
Other Academic Researchers $110/hr + overhead
Industrial Rate $300/hr + overhead

    There is a charge for ZEP520A and ESpacer usage.

    The following additional charges apply when an individual is not trained to operate the JBX-9300FS and staff perform the work instead.

          Academic Rate $100/hr + overhead
Industrial Rate $100/hr + overhead

    Overhead rates are as follows:

    57.8% for non-USG Universities and non-DOD federal
    62.0% for DOD
    63.8% for Industry
Electron Beam Lithography Facility
Institute for Electronics and Nanotechnology, Georgia Institute of Technology