Electron Beam Lithography Training
We prefer that individuals be trained to operate the JBX-9300FS themselves, whether they be
researchers within Georgia Tech, from other academic institutions, or from a company. We can also be contracted to perform work for you.
The first step to being trained is to attend a training session which can be requested on the cleanroom.ien.gatech.edu website.
Electron Beam Lithography Rates
JBX-9300FS usage costs:
The following charges apply when an individual operates the JBX-9300FS.
| ||Georgia Tech Researchers|| ||$110/hr + overhead|
| ||Other Academic Researchers|| ||$110/hr + overhead|
| ||Industrial Rate|| ||$300/hr + overhead|
There is a charge for ZEP520A and ESpacer usage.
The following additional charges apply when an individual is not trained to operate the JBX-9300FS and staff perform the work instead.
| ||Academic Rate|| ||$100/hr + overhead |
| ||Industrial Rate|| ||$100/hr + overhead |
Overhead rates are as follows:
|57.8% for non-USG Universities and non-DOD federal|
|62.0% for DOD|
|63.8% for Industry|