Nanolithography.  The Electron Beam Lithography Facility at the Institute for 
        Electronics and Nanotechnology of the Georgia Institute of Technology. Georgia Institute of Technology Institute for Electronics and Nanotechnology
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Publications:

    3. Min-gu Kim, Devin K. Brown, Oliver Brand "Nanofabrication for all-soft and high-density electronic devices based on liquid metal" Nature Communications, 2020-12, DOI: 10.1038/s41467-020-14814-y

    2. Kyu-Tae Lee, Mohammad Taghinejad, Jiahao Yan, Andrew S. Kim, Lakshmi Raju, Devin K. Brown, Wenshan Cai, "Electrically Biased Silicon Metasurfaces with Magnetic Mie Resonance for Tunable Harmonic Generation of Light, ACS Photonics", 2019-11-20, DOI: 10.1021/acsphotonics.9b01398

    1. Min-gu Kim, Devin K. Brown, Oliver Brand "Submicrometer-Scale All-Soft Electronics Based on Liquid Metal", 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS XXXIII), 2019-06, DOI: 10.1109/transducers.2019.8808502
Electron Beam Lithography Facility
Institute for Electronics and Nanotechnology
Georgia Institute of Technology