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HSQ Thickness vs. Spin Speed Curves
6% XR-1541 HSQ solution
1000 rpm - 1900 Ang
2000 rpm - 1337 Ang
3000 rpm - 1108 Ang
4000 rpm - 972 Ang
5000 rpm - 883 Ang
Fit line: y = 50710x^-0.477
2% XR-1541 HSQ solution
velocity------acceleration-------time-------thickness
2000 rpm----1000 rpm/s-------60s-------450 A
3000 rpm----1500 rpm/s-------60s-------390 A
4000 rpm----2000 rpm/s-------60s-------353 A
5000 rpm----3000 rpm/s-------60s-------323 A
5000 rpm----5000 rpm/s-------90s-------287 A
2% HSQ Fit line: y = 2916.9x^-0.267
1% solution on 1" pieces:
velocity------acceleration-------time-------thickness
1000 rpm----500 rpm/s--------60s-------278 A
2000 rpm----1000 rpm/s-------60s-------196 A
3000 rpm----1500 rpm/s-------60s-------178 A
4000 rpm----2000 rpm/s-------60s-------151 A
5000 rpm----2500 rpm/s-------60s-------139 A
1% XR-1541 HSQ Fit line: y = 5109.5x^-0.424
1% XR-1541 HSQ solution on 4" wafer:
velocity------acceleration-------time-------thickness
3000 rpm----1500 rpm/s-------60s-------165 A
5000 rpm----2500 rpm/s-------60s-------116 A
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