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ma-N 2403 Process
1. 2500RPM, 30sec spincoat ma-N 2403 gives 300nm thickness
2. 90C hotplate for 1 min
3. expose (base dose for greater than 1um features is 400uC/cm2)
4. 70sec immersion develop MF-319 (2.5% TMAH w/ surfactant)
5. 5 min immersion in overflowing, bubbling beaker of water
To remove ma-N 2403:
1. soak in Acetone (~15min)
OR
2. O2 plasma
for metal liftoff process:
1. soak in 1165 Remover (NMP) at 80C for 1 hour
2. may also require ultrasonic bath for 5 - 15 min
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