Nanolithography.  The Electron Beam Lithography Facility at the Institute for Electronics and Nanotechnology of the Georgia Institute of Technology.Georgia Institute of TechnologyInstitute for Electronics and Nanotechnology
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Information on nanometer scale etching:

Metal Etching:
Silicon etching:
Silicon dioxide etching: InSb etching:
Electron Beam Lithography Facility
Institute for Electronics and Nanotechnology, Georgia Institute of Technology